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CD130
Square-Re-Entrant Tips, 3-D imaging, Width 130nm, Length 800nm
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Tip Specification
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| Geometry: |
Isotropic |
| Tip Height (h): |
14 - 16µm
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| Front Angle (FA): |
10 ± 2° |
| Back Angle (BA): |
10 ± 2° |
| Side Angle (SA): |
10 ± 2°
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| Tip SetBack (TSB)(Nom): |
10µm |
| Tip Set Back (TSB)(RNG): |
5 - 25µm |
| Tip Tilt Compensation: |
0°
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| Overhang: |
5 - 15nm |
| Tip Width: |
90 - 130nm
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| Vertical Edge Height: |
< 15nm
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| Effective Length: |
700 - 900nm
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Cantilever Specification
The Aluminum reflective coating on the backside of the cantilever increases the laser signal (A+B) by up to 2.5 times. It is to assist the machine vision application on Automated AFMs.
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Material:
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0.01 - 0.02 Ωcm Antimony (n) doped Si |
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Thickness (t)(Nom):
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4µm
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Thickness (t)(RNG):
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3.5 - 4.5µm
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Back Side Coating:
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40 ± 10nm of Al |
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| Nom. |
Min. |
Max. |
| 125 |
120 |
130 |
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| Nom. |
Min. |
Max.
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| 350 |
300 |
400 |
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